AFM & Scanning Probe Microscopy
Piezo Stages for Atomic Force Microscopy (AFM)
Low-bow piezo nanopositioning stages and scanners for AFM, scanning probe microscopy, nanomanipulation, and applications requiring extremely flat, precise motion.
Nanopositioning Stages for AFM and SPM
PI nanopositioning systems are designed for high tracking accuracy, typically in the range of about 10 nanometers or less. This performance is achieved with computer-modeled, precision EDM-cut flexures that are very stiff perpendicular to the commanded direction of motion.
Atomic force microscopy and scanning probe microscopy can require even tighter out-of-plane performance. When sample structures are measured on the atomic or molecular scale, scanner flatness, straightness, repeatability, and dynamic stability become critical parts of the measurement system.
For these applications, low-bow piezo scanners help minimize vertical error during XY scanning, supporting more accurate surface measurement and high-resolution nanoscale imaging.
AFM Stage Priorities
- Nanometer and sub-nanometer resolution
- Low out-of-plane motion
- High linearity and repeatability
- Fast response and stable tracking
- Compact flexure-guided design
Active Trajectory Control
Active trajectory control can reduce out-of-plane error even further which is especially important in AFM, SPM, and other surface measurement applications.
For AFM systems requiring out-of-plane error of one nanometer or less, the scanner is not just a positioning device; it becomes part of the measurement chain. This is where piezo flexure guidance, capacitive feedback, and low-bow motion design can make a direct difference in data quality.
Piezo AFM Stage and Scanner Examples
| Image | Model | Description | Travel | Sensor |
|---|---|---|---|---|
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P-734 | XY nanoscanning stage with extremely flat and straight motion, suitable for AFM and high-resolution scanning applications. 56 x 56 mm clear aperture. | 100 x 100 µm | Capacitive |
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P-752 | Fast and accurate nanopositioning stage with outstanding guiding accuracy for precision scanning and positioning tasks. | 15, 30 µm | Capacitive |
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Piezo Scanner Tubes | XY and XYZ piezo scanner tubes run on +/- 250V. UHV-compatible. Custom materials, temperature range, segmentation avaialable. Picometer-level resolution. | up to 70 x 70 x 9 µm | - |
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XYZ Shear Piezo | XY and XYZ shear piezo actuators for AFM, SPM, and nanomanipulation. Designed for extremely fine motion with picometer-level resolution. | up to 10 x 10 x 10 µm | Capacitive |
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N-310 | OEM miniature piezo motor linear actuator for compact positioning designs. Non-magnetic, vacuum compatible, compact, fast, and capable of sub-nanometer resolution. | 20 mm | - |
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Custom | PicoCube® XYZ high-precision scanner for AFM and bio-/nanomanipulation. High bandwidth, high linearity, and very high resolution. | 1 x 1 x 0.8 µm | - |
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Custom | PicoCube® XY and XYZ high-precision system for AFM, SPM, and nanomanipulation. Designed for extremely fine motion with picometer-level resolution. | 5 µm / axis | Capacitive |
AFM Piezo Scanner Brochure
Download the brochure for planar AFM piezo scanner stages and controllers.
