PI nanopositioning systems intrinsically have a high tracking accuracy, which is typically in the region of about 10 nanometers or less. This is achieved by using computer modeled precision EDM-cut flexures which are very stiff in the direction perpendicular to the direction of motion.

AFM—One Nanometer or Less
There are applications, however, which require a out-of-plane errors of less than one nanometer. This is the case with scanning atomic force microscopes, where the structure of the sample is on the atomic scale.

PICOPlane™ for Nanometer Flatness
PICOPlane™ is a one or two-dimensional method which counteracts the crosstalk into the axis perpendicular to the scan plane or the line of motion and reduces it to a minimum. Talk to PI about your AFM requirments.

Brochure: Planar AFM Piezo Scanner Stages & Controllers